Chemical-liquid controlling apparatus

Details Chemical-liquid controlling apparatus Chemical-liquid controlling apparatus

1999-03-12

2000-12-26

Smith, Duane S.

Gas separation: apparatus

Degasifying means for liquid

With control means responsive to sensed condition

96179, 96180, 96197, 96220, B01D 1900

Patent

active

061652555

ABSTRACT:
A chemical-liquid controlling apparatus is described. The chemical-liquid controlling apparatus is mounted between a chemical-liquid container and an exhaust apparatus. During a chemical-liquid refilling process, once the chemical liquid is drawn out of the container by the exhaust apparatus, the chemical liquid first enters the chemical-liquid controlling apparatus. The chemical-liquid controlling apparatus separates the chemical liquid from a nitrogen gas and a chemical gas. In addition, the chemical-liquid refilling process is stopped by a signal transmitted from a leak sensor.

REFERENCES:
patent: 2815765 (1957-12-01), Adelson
patent: 3116999 (1964-01-01), Armbruster
patent: 3981335 (1976-09-01), Deters
patent: 4074734 (1978-02-01), De Beau et al.
patent: 4355652 (1982-10-01), Perkins
patent: 4955992 (1990-09-01), Goodale et al.
patent: 4997464 (1991-03-01), Kopf

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