Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Patent
1997-10-29
1999-11-16
Breneman, Bruce
Etching a substrate: processes
Nongaseous phase etching of substrate
Etching inorganic substrate
216 11, B44C 122
Patent
active
059851660
ABSTRACT:
A two-phase etching system having an etchant solution and an overlayer of a protective solvent. The physical properties of the etchant solution and the protective solvent are matched to form a substantially flat meniscus on the top surface of the etchant solution around a fiber immersed in the protective solvent and the etchant solution. Convective flows within the etchant solution are maintained to form a smooth and sharp fiber probe with a small tip apex.
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patent: 5714196 (1998-02-01), Vacha
A. Piednoir, et al. "Imagining and Local Infrared Spectroscopy With A Near Filed Optical Microscope" Elsevier Science B.V.
P. Hoffmann, et al., "Comparison of Mechanically Drawn and Protection Layer Chemically Etched Optical Fiber Tips", 1996 Elsevier Science B.V.
Kossakovski Dmitri A.
Unger Marc A.
Ahmed Shamim
Breneman Bruce
California Institute of Technology
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