Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1991-02-08
1992-09-08
Beck, Shrive
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427249, 427 50, 427314, 427122, 427 49, 428408, B05D 306, C23C 1626
Patent
active
051457121
ABSTRACT:
A method and apparatus for depositing patterned diamond including a container having a chamber sealed sufficiently to be evacuated to a low pressure, a support positioned in the said container, a grid extending within the container to divide it into a first chamber region and a second chamber region, a grid bias supply for creating an electric charge on the grid, a gas including a plurality of carbon-containing molecules and positioned within the first chamber region, a filament positioned within the first chamber region, a filament heater for heating the filament to a temperature sufficient to dissociate at least some of the carbon-containing molecules into a plurality of ions, a filament bias supply for creating an electric charge on the filament, a substrate on which diamond crystals can grow positioned in the second chamber region, a substrate bias supply for creating an electric charge on the substrate, and a substrate heater for heating the substrate to a temperature sufficient for the formation of diamond crystals. In one aspect of the invention, the filament bias is maintained at a negative charge, the grid bias is maintained at a positive charge and the substrate bias is maintained at a positive charge greater than the grid bias.
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Doty Fred P.
Jesser William A.
Beck Shrive
Center For Innovative Technology
King Roy V.
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