Agitating – Having specified feed means – Responsive to condition sensor
Reexamination Certificate
2005-07-26
2005-07-26
Cooley, Charles E. (Department: 1723)
Agitating
Having specified feed means
Responsive to condition sensor
C366S160200
Reexamination Certificate
active
06921193
ABSTRACT:
A chemical concentration control device for a semiconductor processing apparatus being capable of keeping processing chemicals at constant concentrations, and of maintaining the liquid level required for processing is provided. A semiconductor processing apparatus includes a concentration measuring unit, a drift observation unit, a replenishment quantity calculating unit, a concentration estimating unit, a fixed-quantity replenishment processing unit, and a replenishment control unit for controlling replenishment of chemicals based on the replenishment quantities calculated by the fixed-quantity replenishment processing unit, so that the replenishment quantity calculating unit calculates the replenishment quantities of the respective chemicals with respect to the predetermined reference replenishment quantity based on data measured by the concentration measuring unit and the drift observation unit, and estimated concentration data supplied from the concentration estimating unit.
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Cooley Charles E.
Frishauf Holtz Goodman & Chick P.C.
Kaijo Corporation
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