Chemical and biological sensor based on microresonators

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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H01L 4108

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active

057449023

ABSTRACT:
A chemical/biological sensor is formed from a coated microresonator array. In operation, both mass changes and temperature changes due to the presence of a particular substance or agent will cause an output frequency change which can be attributed to that particular substance or agent. Further, the frequency changes caused by mass loading can be distinguished from those frequency changes caused by temperature changes due to the heat from adsorption or reaction. This is because frequency changes due to mass loading are independent from frequency changes due to temperature changes, and therefore, by measuring the frequency changes of the microresonators coated with a variety of adsorbers, one can independently separate the two types of frequency changes, and, thereby, identify and quantify the adsorbing agents.

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