Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From sulfur-containing reactant
Reexamination Certificate
2008-07-08
2008-07-08
Gulakowski, Randy (Department: 1796)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From sulfur-containing reactant
C430S285100, C430S281100, C430S270100, C430S921000, C430S922000, C430S914000
Reexamination Certificate
active
11643662
ABSTRACT:
The present invention provides a sulfonium salt of the formula (Ia)a polymeric compound comprising a structural unit of the formula (Ib)and a chemical amplification type positive resist composition comprising (A) an acid generator comprising at least one compound selected from the group consisting of a sulfonium salt of the formula (Ia), a polymeric compound comprising a structural unit of the formula (Ib), and a sulfonium salt of the formula (Ic); and(B) resin which contains a structural unit having an acid labile group and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid.
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Kamabuchi Akira
Uetani Yasunori
Yamada Airi
Gulakowski Randy
Sumitomo Chemical Co,. Ltd.
Toscano Alicia M
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