Chemical agent producing device and method thereof

Details Chemical agent producing device and method thereof Chemical agent producing device and method thereof

1994-07-06

1997-10-07

Breneman, R. Bruce

Etching a substrate: processes

Nongaseous phase etching of substrate

Projecting etchant against a moving substrate or controlling...

216 85, 216 93, 156345, 1566271, 1566421, 134 13, H01L 21306, H01L 21304

Patent

active

056744102

ABSTRACT:
The purity of a liquid chemical agent is improved simultaneously with obtaining a homogeneous concentration of a specific chemical in the agent, thereby improving the quality of substrate processing steps. Pure water is supplied from a pure water supply (30) into a process tank (1) by opening an opening/closing valve (33) on a pure water supply system (7) and by closing an opening/closing valve (19) on a circulation system (5). After the process tank (1) is completely charged with pure water, the opening/closing valve (33) is closed while the opening/closing valve (19) is opened. This closes a pipe conduit (11) of the circulation system (5) and allows pure water in the process tank (1) to be circulated through the circulation system (5) by a pump (13). A first opening/closing valve (49) on a gas supply system (9) is subsequently opened to allow hydrogen chloride gas from a hydrogen chloride gas supply (40) to be fed into a mixing unit (17) of the circulation system (5). This results in mixing of the hydrogen chloride gas with pure water in the mixing unit (17) to make a liquid chemical agent.

REFERENCES:
patent: 3306792 (1967-02-01), Thurmel et al.
patent: 3526560 (1970-09-01), Thomas
patent: 3999564 (1976-12-01), Pesek
patent: 4190481 (1980-02-01), Goffredo
patent: 4388276 (1983-06-01), Konstatouros et al.
patent: 4576677 (1986-03-01), Faul et al.
patent: 4838979 (1989-06-01), Nishida et al.
patent: 4971654 (1990-11-01), Scknegg et al.
patent: 5082518 (1992-01-01), Molinaro
patent: 5191908 (1993-03-01), Hiroe et al.
patent: 5227010 (1993-07-01), Lufert et al.
patent: 5282923 (1994-02-01), Cannizzaro
patent: 5415191 (1995-05-01), Mashimo et al.
patent: 5470421 (1995-11-01), Nakada et al.

Affiliated with

Also associated with

Rating

Chemical agent producing device and method thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Chemical agent producing device and method thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chemical agent producing device and method thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2354058