Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Patent
1995-05-08
1996-10-01
Lieberman, Paul
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
510176, 510405, 510409, 510479, 510480, 510499, 134 2, 134 38, 430260, 430329, 430331, C11D 320, C11D 330, C11D 726, C11D 732
Patent
active
055611052
ABSTRACT:
A non-corrosive photoresist composition containing:
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Delcotto Gregory R.
Lieberman Paul
OCG Microelectronic Materials Inc.
Simons William A.
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