Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1995-08-10
1997-04-15
Gonzalez, Frank
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356445, 356444, 348180, 345904, G01N 2100
Patent
active
056215215
ABSTRACT:
Provided is a checking apparatus for array electrode substrate, which can check an array electrode substrate in non-contact and at high speed. A probe assembly includes a plurality of electro-optic probes arranged in the staggered relation. Since this arrangement uses a plurality of (for example, eight, sixteen, twenty, forty, etc.) small electro-optic probes, it becomes equivalent to an arrangement of an elongate electro-optic probe, thereby enabling simultaneous measurement of potentials of numerous unit electrodes. Namely, because a measurement light beam is incident into each electro-optic probe and each reflection-return light is detected by a photodector, potentials of unit electrodes in a number corresponding to the number of electro-optic probes can be simultaneously measured. Since deflection of the measurement light beams in the array direction is synchronized with relative movement between the electrode arrays and the probe assembly in a direction perpendicular to the array direction, after completion of measurement of an electrode array in a certain line, next measurement of an electrode array in a next line, can be started, as a result, enabling continuous potential measurement.
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Gonzalez Frank
Hamamatsu Photonics K.K.
Stafira Michael P.
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