Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate
2006-12-12
2006-12-12
Karlsen, Ernest (Department: 2829)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
C156S345280, C324S754120
Reexamination Certificate
active
07148705
ABSTRACT:
The charging voltage measuring device includes a measuring electrode for forming an electrostatic capacity Cs with a substrate disposed on a substrate holding unit, a measuring capacitor, which has an electrostatic capacity Cm, being connected between the measuring electrode and a ground potential portion, and, a voltage measuring unit for measuring a measuring voltage Vm across the measuring capacitor, and a calculating unit. The calculating unit22calculates the charging voltage Vs on the surface of the substrate at time t1in accordance with the following numerical expression on the basis of the measuring voltage Vm(t1) at time t1, an inverse K of a voltage dividing ratio and a resistance value Rm of a resistor disposed in parallel to the measuring capacitor18, when the measurement time is t1in-line-formulae description="In-line Formulae" end="lead"?Vs=K[Vm(t1)+{1/(Cm·Rm)}∫0t1Vm(t)dt]in-line-formulae description="In-line Formulae" end="tail"?where K=(Cs+Cm)/Cs or K=Cm/Cs (if Cm>>Cs).
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Karlsen Ernest
Nissin Ion Equipment Co., Ltd.
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