Charging device for semiconductor processing installations

Details Charging device for semiconductor processing installations Charging device for semiconductor processing installations

1995-04-28

1998-02-10

Valenza, Joseph E.

Conveyors: power-driven

Conveyor for changing attitude of item relative to conveyed...

By actuating item-holder relative to holder-carrying conveyor

198409, 414940, B65G 4724

Patent

active

057159297

ABSTRACT:
The object of a charging device for semiconductor processing installations is to increase the flexibility of the charging process while excluding negative influences on dependability and clean room conditions. At least in a portion of the movement of a linearly movable part which is supported by a stationary part of a drive for transferring a transport object between two end positions, a gripper for the transport object being attached to the movable part, a rotating movement of the gripper is combined with the linear movement. The device is provided in particular for use in the fabrication of semiconductors.

REFERENCES:
patent: 2840219 (1958-06-01), Mervyn et al.
patent: 4119211 (1978-10-01), Boyer et al.
patent: 4674936 (1987-06-01), Bonora
patent: 5013213 (1991-05-01), Roberts et al.
patent: 5220990 (1993-06-01), Young-Cheol
Gehen Sie auf's Ganze: Ve langen Sie Systemberatung, 1987.
Elektrische Maschinen und Steuerungstechnik, Horst Flachmann et al., 1980.
Dubbel, Taschenbuch fur den Maschinenbau, 1970, pp. 732-733.

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