Charged particle spectrometers

Details Charged particle spectrometers Charged particle spectrometers

1980-11-26

1982-11-09

Anderson, Bruce C.

Radiant energy

Electron energy analysis

H01J 4000

Patent

active

043586805

ABSTRACT:
An electron spectrometer includes a hemispherical analyzer and a multi-element optical lens system. The lens system has, at its entrance, two spaced apart mesh elements which are concave toward the sample, for reducing the lens aberrations, and switching means operable to change the potentials on the lens elements to optimize the performance of the spectrometer for both Auger Electron Spectrometry and X-ray Spectrometry.

REFERENCES:
patent: 3617741 (1971-11-01), Siegbahn
patent: 3733483 (1973-05-01), Green et al.
patent: 3777159 (1973-12-01), Hammond et al.

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