Charged particle spectrometer and detector therefor

Details Charged particle spectrometer and detector therefor Charged particle spectrometer and detector therefor

2003-11-04

2008-12-30

Souw, Bernard E (Department: 2881)

Radiant energy

Electron energy analysis

C250S261000, C250S306000, C250S307000, C250S282000, C250S3960ML, C250S397000

Reexamination Certificate

active

07470901

ABSTRACT:
A charged particle (e.g. photoelectron) spectrometer is operable in a first mode to produce an energy spectrum relating to the composition of a sample being analysed, and in a second mode to produce a charged particle image of the surface of the sample being analysed. A detector is used to detect charged particles produced in both modes of operation. A method of operation of the spectrometer includes the step of selecting which of said first and second modes to use and the detector being operated accordingly.

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