Charged particle source with integrated energy filter

Details Charged particle source with integrated energy filter Charged particle source with integrated energy filter

2011-08-16

2011-08-16

Berman, Jack (Department: 2881)

Radiant energy

Electron energy analysis

C250S3960ML

Reexamination Certificate

active

07999225

ABSTRACT:
The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles103eccentrically through a lens107. As a result of this, energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit109in an energy selecting diaphragm108, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam113will have a reduced energy spread. Deflection unit112deflects the beam to the optical axis101. One can also elect to deflect a beam105going through the middle of the lens toward the optical axis and having, for example, greater current.The energy dispersed spot is imaged on the slit by a deflector111. When positioning the energy dispersed spot on the slit, central beam105is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm. Hereby reflections and contamination resulting from this beam in the region after the diaphragm are avoided. Also electron-electron interaction resulting from the electrons from the central beam interacting with the energy filtered beam in the area of deflector112is avoided.

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