Charged particle optical systems having therein means for correc

Details Charged particle optical systems having therein means for correc Charged particle optical systems having therein means for correc

1987-07-13

1989-04-18

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250396R, H01J 4000, H01J 4700

Patent

active

048230030

ABSTRACT:
A charged particle optical system, e.g. an energy or mass analyzer or a lens system, has a plurality of corrector electrodes (20 to 23) spaced apart across a particle beam passing from a monoenergetic source (4) to a focus (6) and dividing the beam into individual portions with central trajectories (30,31,32) the connector electrodes being electrically biassed to deflect the particles of the beam so as to reduce the aberration caused by portions with central trajectories intersecting the optical axis at different distances from the desired focus.

REFERENCES:
patent: 3407323 (1968-10-01), Hand
patent: 3735128 (1973-05-01), Palmberg
patent: 4002912 (1977-01-01), Johnson
patent: 4150319 (1979-04-01), Nowak et al.
patent: 24352919 (1948-11-01), Gabor
patent: 4672261 (1987-06-01), Shirai et al.

Affiliated with

Also associated with

Rating

Charged particle optical systems having therein means for correc does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle optical systems having therein means for correc, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle optical systems having therein means for correc will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2398292