Charged particle irradiation apparatus

Details Charged particle irradiation apparatus Charged particle irradiation apparatus

1976-07-07

1978-02-21

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250396ML, H01J 3700

Patent

active

040754960

ABSTRACT:
A charged particle beam generating apparatus irradiates an article on all sides thereof by scanning the beam across the article and magnetically curving the beam, when scanned away from the article, to the back side of the article. The magnetic structure provides a magnetic field normal to the scanning direction with a field intensity that is greater near the article than it is further from the article. This results in more nearly uniform irradiation of the entire peripheral surface of the article.

REFERENCES:
patent: 2897365 (1959-07-01), Dewey et al.
patent: 3104321 (1963-09-01), Smith
patent: 3629578 (1971-12-01), LePoole

Affiliated with

Also associated with

Rating

Charged particle irradiation apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle irradiation apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle irradiation apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-128345