Charged particle generating device and focusing lens therefor

Details Charged particle generating device and focusing lens therefor Charged particle generating device and focusing lens therefor

1989-06-20

1992-03-10

Anderson, Bruce C.

Radiant energy

Record projectors

250396R, 3133611, H01J 37147

Patent

active

050952080

ABSTRACT:
A charged particle generating device such as an ion implanter, a secondary ion mass spectrometer having a good mounting operability, a simple construction, good characteristics such as sensitivity, etc., owing to the fact that there is disposed a focusing electrode composed of the cylindrical electrodes disposed coaxially with each other, at least the inner electrode thereof having a plurality of openings.

REFERENCES:
patent: 2769910 (1956-11-01), Elings
patent: 3920990 (1975-11-01), Van Nieuwland et al.
patent: 4002912 (1977-01-01), Johnson
patent: 4107526 (1978-08-01), McKinney et al.
patent: 4439684 (1984-03-01), Hemmerich et al.
patent: 4672261 (1987-06-01), Shirai et al.

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