Charged particle filter

Details Charged particle filter Charged particle filter

2010-01-12

2011-11-01

Berman, Jack (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C335S210000

Reexamination Certificate

active

08049182

ABSTRACT:
A charged particle filter comprises a magnetic deflector and an outer shield. The magnetic deflector has a bore along an axis thereof passing through the deflector from a specimen end to a detector end of the deflector and through which charged particles pass when in use. The deflector is formed from one or more magnets positioned around the bore in a Halbach configuration thereby generating a relatively high magnetic field strength within the bore and a relatively low magnetic field strength outside of the deflector. The deflector has a geometry defining an outer surface and an inner surface, wherein each of the outer and inner surfaces of the deflector taper towards the axis as a respective function of distance in the specimen direction along the axis. The outer shield is formed from a soft magnetic material surrounding the magnet deflector on an outer surface side of the deflector and having a projecting portion which extends in the specimen direction with respect to the magnetic deflector from the specimen end of the deflector.

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Herlach, F. et al, “High Magnetic Fields: Science and Technology, v.1,” Publisher: Imperial College Press (United Kingdom), 2003, ISBN 9789810249649, p. 31 et seq.

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