Radiant energy – Ion generation – Methods
Reexamination Certificate
2011-01-18
2011-01-18
Berman, Jack I (Department: 2881)
Radiant energy
Ion generation
Methods
C250S42300F, C250S3960ML, C250S492300, C315S111810
Reexamination Certificate
active
07872242
ABSTRACT:
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
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Boswell Roderick
Sutherland Orson
Australian National University
Berman Jack I
FEI Company
Griner David
Sahu Meenakshi S
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