Charged particle extraction arrangement

Details Charged particle extraction arrangement Charged particle extraction arrangement

1991-10-22

1992-11-17

Berman, Jack I.

Radiant energy

Ionic separation or analysis

With sample supply means

250294, 250296, 250309, 250396R, H01J 4904

Patent

active

051645947

ABSTRACT:
An arrangement is described for extracting charged particles which have been emitted from a sample due to the impact of a primary ion beam. The arrangement comprises an electrode arrangement effective to produce an electric potential which is non-linear along a chosen direction of travel of the particles. A system of einzel lenses is effective to match the trajectories of the particles passing from the electrode means to the analyser of a mass spectrometer.

REFERENCES:
patent: 4556794 (1985-12-01), Ward et al.
patent: 4800273 (1989-01-01), Phillips

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