Charged particle energy spectrometer

Details Charged particle energy spectrometer Charged particle energy spectrometer

1984-08-16

1986-06-03

Anderson, Bruce C.

Radiant energy

Electron energy analysis

H01J 4000

Patent

active

045931968

ABSTRACT:
A charged particle energy spectrometer, typically an electron spectrometer, comprising an electrostatic dispersive charged particle analyzer, e.g. a substantially hemispherical sector analyzer (1,6), and a detector means comprising a plurality of charged particle detectors (26-28) is described. Fringing fields at the exit of the analyzer are corrected by a fringing field corrector plate (7) containing a plurality of apertures (20, 22, 23) each aligned with one channel of the detector means. Exit beam defining slits (21, 24, 25) in a plate (12) situated in the exit focal plane of the analyzer may optionally be provided. Each aperture (20, 22, 23) is preferably the same size and shape as the single aperture used to achieve optimum correction of the fringing fields in a conventional spectrometer having a single channel detector. One or more position sensitive detectors may be used in place of some or all of the detectors (26-28).

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