Charged particle energy analyzers

Details Charged particle energy analyzers Charged particle energy analyzers

1992-10-16

1994-02-15

Dzierzynski, Paul M.

Radiant energy

Electron energy analysis

250306, H01J 4944

Patent

active

052869741

ABSTRACT:
A charged particle energy analyser has a magnetic lens such as a snorkel-type lens and a source for directing ionising radiation onto a specimen causing charged particles to be emitted from its surface. The specimen is immersed in the magnetic imaging field of the magnetic lens so that particles having energies in a predetermined energy range are brought to a focus, the energies of the focussed particles being analysed by an energy analyser. An electrode arrangement is provided for enabling the magnetic imaging field of the magnetic lens to utilise unfocussed particles to cause charge neutralisation of the specimen. Alternatively, charged particles from a source are subjected to an electric field which is transverse to the optical axis of the magnetic lens and are guided onto the specimen by the magnetic imaging field of the magnetic lens.

REFERENCES:
patent: 4146787 (1979-03-01), Fite
patent: 4748325 (1988-05-01), Slodzian
patent: 4810879 (1989-03-01), Walker
patent: 5185524 (1993-02-01), Dage

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