Charged particle energy analyzers

Radiant energy – Electron energy analysis

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250310, H01J 4700

Patent

active

051855240

ABSTRACT:
A charged particle energy analyzer includes two hemispherical electrodes and means for developing an inverse square electric field in the gap between the two electrodes. An afocal charged particle lens arrangement is arranged to project a charged particle image of a sample into the electric field. Two baffles are disposed in the gap between the electrodes the baffles being effective to restrict the energy and angular divergence of the particles transmitted by the analyzer, the baffles being positioned so as to reduce the dependence of the energy and the orientation of the charged particles transmitted by the baffles on the position of the particles within the image. A two-dimensional detector is arranged to detect the charged particle image transmitted by the analyzer.

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patent: 4959544 (1990-09-01), Sukenobu
H. Diamon, "New display-type analyzer for energy and the angular distribution of charged particles," Rev. Sci. Instrum. 594(4), pp. 545-549 (1988).
H. Z. Sar-El, "More on the Spherical Condenser An An Analyzer I. Nonrelativistic Part," Nuclear Instruments and Methods 42, pp. 71-76 (1966).
H. Daimon et al., "New Display-Type Analyzer for the Energy and the Angular Distribution of Charged Particles," Shimadzu Review, vol. 47, No. 1, pp. 5-10 (May 1990), Kyoto JP.
Soviet Inventions Illustrated, Section EI, Week 8726, Jul. 8, 1987, Derwent Publications Limited, London, GB and S.U. 1269216 (Electronics Inst) Nov. 7, 1986.
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