Charged particle energy analyzer

Radiant energy – Electron energy analysis

Patent

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Details

250310, H01J 4948

Patent

active

045462542

ABSTRACT:
A charged particle energy analyzer comprises a source for generating radiation to be incident on a sample so as to emit charged particles from the sample, a low energy pass reflection filter for selectively reflecting the charged particles having energy lower than a first value, a high energy pass transmission filter for selectively transmitting the charged particles having energy higher than a second value. The low energy pass reflecting filter comprises a reflector and a first grid. The reflector is a spheroid mirror having two complex focuses, disposed in a symmetrical manner, at which the sample and a detector are disposed. The detector detects the selected charged particles.

REFERENCES:
patent: 3749926 (1973-07-01), Lee
patent: 3790781 (1974-02-01), Horl et al.

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