Charged particle energy analyzer

Details Charged particle energy analyzer Charged particle energy analyzer

1987-04-10

1989-03-07

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250306, H01J 4944

Patent

active

048108790

ABSTRACT:
A charged particle energy analyzer, such as a microscope or spectrometer, includes a magnetic immersion lens 10 to focus charged particles emitted from an irradiated specimen 5 located within the magnetic field of the lens. A collecting aperture 18 defines the area of the irradiated specimen from which charged particles can be brought to a focus in the image plane of the lens but an aperture 21 in this plane selects and defines a much smaller area of the specimen from which the received particles are passed to a suitable energy analyzing means 25. The energy analyzing means 25 then performs energy analysis of the small selected area of the specimen by imaging the small area with emitted particles of a predetermined energy, or energy scanning the particles emitted from this area, so giving a chemical analysis of the small selected area of the specimen surface.

REFERENCES:
patent: 3766381 (1973-10-01), Watson
patent: 3822382 (1974-07-01), Koike
patent: 4680467 (1987-07-01), Bryson et al.

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