Charged particle energy analyzer

Details Charged particle energy analyzer Charged particle energy analyzer

1986-11-07

1988-09-06

Church, Craig E.

Radiant energy

Electron energy analysis

250309, 250396R, 250292, H01J 4948

Patent

active

047695420

ABSTRACT:
The invention provides a charged-particle energy analyzer of the cylindrical mirror type (2,9,10) which incorporates beam shaping means (5,6) at one, or preferably both, ends. The beam shaping means to convert a substantially parallel beam of charged particles to an annular beam which diverges at the optimum entrance angle of the CMA, and v.v. They enable the CMA to operate efficiently with parallel input and output beams of circular cross section, and allow it to be efficiently combined with a mass analyzer, especially a quadrupole mass analyzer (31,32) to provide a compact energy-filtered mass spectrometer particularly suitable for secondary ion mass spectrometry.

REFERENCES:
patent: 3935453 (1976-01-01), Liebl
Satake et al., Japanese Journal of Applied Physics, vol. 1, No. 7, Jul. 1976, pp. 1359-1366.
Schubert et al., Review of Scientific Instruments, vol. 44, No. 4, Apr. 1973, pp. 487-491.
Sar-el, Review of Scientific Instruments, vol. 35, No. 9, Sep. 1967, pp. 1210-1216.

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