Charged particle detector

Details Charged particle detector Charged particle detector

1988-09-23

1989-09-19

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With detector

250305, 250310, 313103CM, 313105CM, H01J 37244

Patent

active

048683949

ABSTRACT:
A charged particle detector comprises a micro-channel plate for detecting charged particles secondarily generated from a specimen irradiated with a narrowly defined beam of charged particles, a signal outputting circuit for transmitting therein a signal detected by the micro-channel plate and then outputting the signal, and a processing circuit for simultaneously outputting signals of secondary charged particles generated from the specimen at the same instant of time. Preferably, the processing circuit is constructed by a vortex-shaped electrode or the combination of concentric electrode segments and delaying elements.

REFERENCES:
patent: Re29500 (1977-12-01), Hoppe
patent: 3626184 (1971-12-01), Crewe
patent: 3896308 (1975-07-01), Venables et al.
patent: 4540885 (1985-09-01), Plies et al.

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