Charged particle collection

Radiant energy – With charged particle beam deflection or focussing – With detector

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Details

250310, 250305, 2191213, H01J 37244

Patent

active

047942592

ABSTRACT:
A charged particle collector assembly, particularly for use with an electron beam gun, is described. The assembly comprises a reflection member onto which electrons impinge in use, the reflection member being adapted substantially to absorb particles of one polarity and substantially to reflect particles of the other polarity. A sensor or collector is positioned to receive particles reflected from the reflection member and to generate a corresponding output signal.

REFERENCES:
patent: Re27005 (1970-12-01), Wingfield et al.
patent: 4400609 (1983-08-01), Pastushenko et al.
patent: 4587425 (1986-05-01), Plows

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