Charged particle beam system and cooling device, a coil comprisi

Details Charged particle beam system and cooling device, a coil comprisi Charged particle beam system and cooling device, a coil comprisi

1993-05-13

1994-02-22

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

335210, 335300, H01J 322

Patent

active

052890090

ABSTRACT:
A charged particle beam system utilizes a box-shaped cooling member accommodating the lens in order to cool the particle-optical lenses. The cooling medium is circulated between the wall of the lens and the wall of the cooling member, enabling a high transfer of heat by convection. By using a cooling liquid which is undersaturated for air and which is heated prior to its passage through the cooling duct, accumulation of air due to heating can be prevented in the cooling member.

REFERENCES:
patent: 3394254 (1968-07-01), Le Poole
patent: 4817706 (1989-04-01), Miyama et al.
patent: 4896130 (1990-01-01), Ermilov et al.

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