Charged particle beam profile measurement

Details Charged particle beam profile measurement Charged particle beam profile measurement

2011-01-25

2011-01-25

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S398000, C250S299000, C250S283000, C250S3960ML, C250S489000

Reexamination Certificate

active

07875860

ABSTRACT:
According to an embodiment, an apparatus for measuring the uniformity of a beam of charged particles at an exposure location includes a plurality of Faraday cups, each cup including an electrometer for determining the current collected by said cup, at least one multi-channel low current scanner card electrically coupled to the electrometers, a processor electrically coupled to said at least one scanner card, computational analysis software for receiving signals from said processor and calculating beam parameters, and display software for generating a graphical representation of the beam parameters calculated by said computational analysis software.

REFERENCES:
patent: 5198676 (1993-03-01), Benveniste et al.
patent: 6507033 (2003-01-01), Musket et al.
patent: 7282709 (2007-10-01), Darling et al.
patent: 2004/0262533 (2004-12-01), Krueger
patent: 2008/0073553 (2008-03-01), Blake et al.
patent: 2008/0073584 (2008-03-01), Callahan et al.
patent: 2008/0142727 (2008-06-01), Ryding et al.
patent: 2010/0001204 (2010-01-01), White

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