Charged particle beam performance measurement system and method

Details Charged particle beam performance measurement system and method Charged particle beam performance measurement system and method

1997-09-24

1999-08-10

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504911, H01J 37304

Patent

active

059362529

ABSTRACT:
A charged particle beam performance measurement system includes a charged particle beam generator device for producing a charged particle beam, a test reticle having at least two areas of higher transparency than its surroundings that form a pattern, a reduction projection imaging device, a reference target having an essentially identical pattern as the test reticle, and a beam current detector. A patterned beam is generated by passing the charged particle beam through the pattern areas of the test reticle. The patterned beam is reduced and projected by the reduction projection imaging device and the reduced patterned beam is imaged onto a reference target. The reduced patterned beam is then exposed to the reference target, wherein some of the beam may pass through reference target pattern areas. Beam current detector records and measures the amount of beam current that is absorbed on, back-scattered from, or transmitted by the target reference, and determines from the measured beam current the accuracy of the projection system.

REFERENCES:
patent: 4503334 (1985-03-01), King et al.
patent: 4583298 (1986-04-01), Raugh
patent: 4675528 (1987-06-01), Langner et al.
patent: 4737646 (1988-04-01), King et al.
patent: 4766372 (1988-08-01), Rao
patent: 5079112 (1992-01-01), Berger et al.
patent: 5130550 (1992-07-01), Nakamura et al.
patent: 5438207 (1995-08-01), Itoh et al.
patent: 5466549 (1995-11-01), Yamada
patent: 5712488 (1998-01-01), Stickel et al.

Affiliated with

Also associated with

Rating

Charged particle beam performance measurement system and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam performance measurement system and method , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam performance measurement system and method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1122325