Charged particle beam optical element charged particle beam expo

Details Charged particle beam optical element charged particle beam expo Charged particle beam optical element charged particle beam expo

1998-01-12

2000-02-22

Westin, Edward P.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250396R, 250396ML, H01J 3712, H01J 3714, H01J 314, G21K 108

Patent

active

060283173

ABSTRACT:
An optical element includes two electrodes 1 and 2 arranged at a distance to oppose each other and configured to converge an electron beam. The opposing surfaces of the electrodes 1 and 2 are so formed as to be cylindrically symmetrical along the beam passing direction and to form curves obtained by deforming hyperbolas in a direction perpendicular to the beam passing direction, in order that an electric field whose effective part except for an arbitrary constant of the field potential is given by

REFERENCES:
patent: 4544846 (1985-10-01), Langner et al.
Hiroshi Daimon, "New Display-Type Analyzer For The Energy And The Angular Distribution Of Charged Particles," Rev. Instrum., vol. 59, No. 4, (1988), pp. 545-549.

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