Charged particle beam lithography system and a method thereof

Details Charged particle beam lithography system and a method thereof Charged particle beam lithography system and a method thereof

1989-10-31

1991-09-24

Albritton, C. L.

Electric heating

Metal heating

By arc

250396ML, 2504922, B23K 1500

Patent

active

050515560

ABSTRACT:
A charged particle beam lithography system comprises a beam source of a charged particle beam, a beam shaping aperture for providing a predetermined cross section to the charged particle beam, a first focusing system for focusing the charged particle beam on a first crossover point located on the optical axis, a second focusing system provided between the first crossover point and an object for focusing the charged particle beam on a second crossover point located on the optical axis, a beam deflection system for deflecting the electron beam such that the beam is moved over the surface of the object, a stage for supporting the object, a mask provided in a vicinity of said first focusing system, and addressing system for selectively deflecting the charged particle beam such that the charged particle beam is passed through a selected aperture on the mask, wherein the addressing system comprises an electrostatic deflector for variable shaping of the charged particle beam and an electromagnetic deflector for deflecting the charged particle beam such that the charged particle beam is selectively passed through selected one of the plurality of apertures except for the predetermined aperture.

REFERENCES:
patent: 4585943 (1986-04-01), Yasuda et al.
patent: 4914304 (1990-04-01), Koyama

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