Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2005-06-07
2005-06-07
Lee, John R. (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S492100, C250S492210, C250S492300, C250S3960ML, C250S397000, C250S398000, C250S306000, C250S307000, C250S309000
Reexamination Certificate
active
06903351
ABSTRACT:
A power supply for applying a voltage to a scanning electromagnet for deflecting a charged particle beam has a first power supply unit having no filter and a second power supply unit having a filter. When an irradiation position of the charged particle beam in an irradiation object is moved, the first power supply unit, namely a power supply unit having no filter, is used to apply the voltage to the scanning electromagnet, so that an exciting current flowing in the scanning electromagnet can be changed in a short time. Further, when the irradiation position of the charged particle beam is maintained, the second power supply is used to apply a voltage whose pulsating component was removed to the scanning electromagnet, so that the exciting current flowing in the scanning electromagnet can be controlled precisely. Consequently, the charged particle beam can be applied uniformly to the irradiation object and an irradiation time of the charged particle beam to the irradiation object can be curtailed.
REFERENCES:
patent: 3893075 (1975-07-01), Orban et al.
patent: 3937997 (1976-02-01), Barrett
patent: 3950651 (1976-04-01), Flocee
patent: 4368409 (1983-01-01), Sivanesan et al.
patent: 4421988 (1983-12-01), Robertson et al.
patent: 4551655 (1985-11-01), Timmermans et al.
patent: 4812716 (1989-03-01), Miyama et al.
patent: 4939413 (1990-07-01), Tomii et al.
patent: 4961056 (1990-10-01), Yu
patent: 4992746 (1991-02-01), Martin
patent: 5063294 (1991-11-01), Kawata et al.
patent: 5073913 (1991-12-01), Martin
patent: 5363008 (1994-11-01), Hiramoto et al.
patent: 5557105 (1996-09-01), Honjo et al.
patent: 5786669 (1998-07-01), Kobori et al.
patent: 5969367 (1999-10-01), Hiramoto et al.
patent: 6066849 (2000-05-01), Masnaghetti et al.
patent: 6316776 (2001-11-01), Hiramoto et al.
patent: 6346773 (2002-02-01), Takegami
patent: 6410929 (2002-06-01), Nakamura et al.
patent: 6472834 (2002-10-01), Hiramoto et al.
patent: 2002/0014588 (2002-02-01), Hiramoto et al.
patent: 2002/0101959 (2002-08-01), Kato et al.
patent: 2002/0128807 (2002-09-01), Sakamoto et al.
patent: 2003/0057382 (2003-03-01), Akiyama et al.
patent: 779 081 (1997-06-01), None
patent: 858 080 (1998-08-01), None
patent: 6-112000 (1994-04-01), None
patent: 8-88972 (1996-04-01), None
Akiyama Hiroshi
Hiramoto Kazuo
Kubo Hiroshi
Hitachi , Ltd.
Lee John R.
Mattingly Stanger & Malur, P.C.
Souw Bernard E.
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