Charged particle beam instrument

Details Charged particle beam instrument Charged particle beam instrument

2005-08-23

2005-08-23

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S491100, C250S492210, C250S311000

Reexamination Certificate

active

06933512

ABSTRACT:
A charged particle beam instrument capable of reducing the spread of the probe diameter while maintaining the probe current constant. An electrical current Idis detected by a detection aperture to create a feedback signal. The feedback signal is supplied to a condenser lens control and to an objective lens control via a signal adjuster. The objective lens control portion controls the objective lens such that the charged particle probe is in focus.

REFERENCES:
patent: 4851844 (1989-07-01), Akagiri
patent: 4990778 (1991-02-01), Norioka
patent: 5404012 (1995-04-01), Yamada
patent: 5767515 (1998-06-01), Honda
patent: 5933217 (1999-08-01), Nakasuji et al.
patent: 1183044 (1989-07-01), None

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