Charged particle beam generating apparatus

Details Charged particle beam generating apparatus Charged particle beam generating apparatus

1990-02-21

1991-08-20

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250423F, 3133611, H01J 37141

Patent

active

050417320

ABSTRACT:
In a charged particle beam generating apparatus, the emitter is so arranged that its distal end is disposed at a level below a peak of a distribution of a magnetic flux density. An inner diameter of a lower portion of a pole piece is smaller than an inner diameter of an upper portion of the pole piece. The peak of the magnetic flux density is disposed close to the lower end of the pole piece, and at the same time the magnetic field is prevented from extending downwardly beyond the lower end of the pole piece.

REFERENCES:
patent: 3144627 (1964-08-01), Dannabeck
patent: 3870891 (1975-03-01), Mulvey
patent: 4315152 (1982-02-01), Smith
patent: 4544845 (1985-10-01), Michel
patent: 4725736 (1988-02-01), Crewe
A. Delong et al., "A New Deisgn of Field Emission Electron Gun with a Magnetic Lens", OPTIK, vol. 81, No. 3, Feb. 1989, pp. 103-108.
M. Troyon, "High Current Efficiency Field Emission Gun System Incorporating a Preaccelerator Magnetic Lens", OPTIK 57, No. 3 (1980), pp. 401-419.
D. W. Tuggle et al., "Emission Characteristics of the ZrO/W Thermal Field Electron Source", Journal of Vacuum Science and Technology, No. 1 (1985), pp. 220-223.

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