Radiant energy – Irradiation of objects or material
Reexamination Certificate
2005-09-20
2005-09-20
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S492200, C250S491100
Reexamination Certificate
active
06946665
ABSTRACT:
A charged particle beam exposure apparatus which exposes a substrate using a plurality of charged particle beams includes a first measurement member for making the plurality of charged particle beams come incident and measuring a total current value of the charged particle beams. A second measurement member makes the plurality of charged particle beams come incident and multiplies electrons of each of the incident charged particle beams, thereby measuring a relative value of a current of each of the charged particle beams.
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Muraki Masato
Nakayama Yoshinori
Ohta Hiroya
Saitou Norio
Yoda Haruo
Hitachi High-Technologies Corporation
Wells Nikita
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