Charged particle beam exposure apparatus

Details Charged particle beam exposure apparatus Charged particle beam exposure apparatus

1994-03-18

1995-05-30

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With target means

2504922, 250399, H01J 37317

Patent

active

054204330

ABSTRACT:
A barrier electrode is formed above an article to be exposed so as to be opposite the surface of the article to be exposed. A voltage is applied to the barrier electrode so as to form a barrier electric field surrounding the optical axis of a charged particle beam and surrounding the article to be exposed.

REFERENCES:
patent: 3736422 (1973-05-01), Weber et al.
patent: 4918358 (1990-04-01), Aihara et al.
patent: 5155368 (1992-10-01), Edwards et al.

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