Charged particle beam expander

Details Charged particle beam expander Charged particle beam expander

1996-12-27

1998-05-26

Nguyen, Kiet T.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, 250398, H01J 37141

Patent

active

057570094

ABSTRACT:
A charged particle beam expander increases a diameter of a charged particle beam while increasing uniformity of an area energy distribution thereof. The charged particle beam expander has a first linear optics section receiving the charged particle beam from a particle accelerator and for forming the charged particle beam to have a generally circular cross-section and a non-linear optics section receiving the charged particle beam from the first linear optics section and for redistributing charged particles from a periphery of the charged particle beam toward a core thereof. The charged particle beam expander also has a second linear optics section receiving the charged particle beam from the non-linear optics section, the second linear optics section for increasing the diameter of the charged particle beam and for imaging the charged particle beam onto the target.

REFERENCES:
patent: 3845312 (1974-10-01), Allison, Jr.
patent: 3956634 (1976-05-01), Tran et al.
patent: 4736106 (1988-04-01), Kashy et al.
patent: 4767930 (1988-08-01), Stieber et al.
patent: 4962317 (1990-10-01), Jason et al.
patent: 5468965 (1995-11-01), Garnett et al.

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