Charged particle beam device for inspecting or structuring a...

Details Charged particle beam device for inspecting or structuring a... Charged particle beam device for inspecting or structuring a...

2005-05-31

2005-05-31

Nguyen, Kiet T. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C250S310000, C250S492200

Reexamination Certificate

active

06900443

ABSTRACT:
The invention provides a charged particle beam device (1) to inspect or structure a specimen (3) comprising a charged particle beam source (5) to generate a charged particle beam (7), a beam optical system (16) to direct the charged particle beam (7) onto said specimen (3) and a gas supply system (10) providing a gas (12) for the charged particle beam device (1), whereby the gas supply system (10) comprises a plurality of at least ten tubes (14; 15; 22) to direct said gas (12) to a desired region (68) for interaction with the specimen (3). The gas support system enables the charged particle beam device to provide sufficient gas for decharging the specimen with a total gas flow which is significantly lower than the total gas flow of charged particle beam devices using previously known gas supply systems. A lower total gas flow helps to improve the vacuum in the charged particle beam region.

REFERENCES:
patent: 5139624 (1992-08-01), Searson et al.
patent: 6066849 (2000-05-01), Masnaghetti et al.
patent: 6182605 (2001-02-01), Frosien
patent: 6576913 (2003-06-01), Koyama
patent: 0 969 494 (2000-01-01), None
patent: 1 047 104 (2000-10-01), None
Frosien, et al., “High Precision Electron Optical System for Absolute and CD-measurements on Large Substrates,” Nuclear Instruments and Methods in Physics Research A 363 (1995) 25-30.
European Search Report, dated Jul. 4, 2003 for EP 03000677.9.

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