Charged particle beam device

Details Charged particle beam device Charged particle beam device

1991-01-29

1992-11-03

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

250311, G01R 3128

Patent

active

051608847

ABSTRACT:
A charged particle beam device radiates a primary charged particle beam of pulse form on a surface of a specimen, once in each clock period, in synchronism with a clock signal that determines an operating period of an internal operating signal of the specimen. A secondary electron or a reflected electron is detected after it is emitted from the surface of the specimen when the primary charged particle beam of pulse form is irradiated. Each detected signal pulse which is generated from the detecting means once in each period of said clock is sampled at two or more positions in a range including the peak value, and data which correspond to the sum or the averaged value calculated from the sampling values of a plurality of the positions are formed. An internal operating signal waveform of said specimen is displayed by using the data, and therefore the internal operating signal waveform of the specimen can be observed and measured with high measuring accuracy and with high efficiency.

REFERENCES:
patent: 4220854 (1980-09-01), Feuerbaum
patent: 4223220 (1980-09-01), Feuerbaum
patent: 4477775 (1984-10-01), Fazekas
patent: 4486660 (1984-12-01), Feuerbaum
patent: 4885534 (1989-12-01), Eck et al.
patent: 4887031 (1989-12-01), Brust

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