Radiant energy – With charged particle beam deflection or focussing – With target means
Patent
1992-02-18
1993-06-22
Dzierzynski, Paul M.
Radiant energy
With charged particle beam deflection or focussing
With target means
250396R, 250396ML, 250311, H01J 3726
Patent
active
052218449
ABSTRACT:
In an electron microscope correction of spherical and chromatic aberration can be achieved in a number of freely adjustable directions by using a multipole correction element whereby a magnetic or electrostatic octupole field, rotatable about the optical axis, or a combined rotatable magnetic and electrostatic quadrupole field is generated. A corrected overall image can be obtained by combination of images successively corrected in different directions. In the case of holographic images, correction in the direction perpendicular to the line direction in the hologram enhances the accuracy of phase determination. A correction element of this kind, having comparatively small dimensions of from 1 to 2 cm, can be simply mounted, notably in a transmission electron microscope, in a space provided for the stigmator.
REFERENCES:
patent: 3952198 (1976-04-01), Harada et al.
patent: 4414474 (1983-11-01), Crewe
patent: 4554457 (1985-11-01), Kelly
patent: 4673794 (1987-06-01), Irie et al.
patent: 4684808 (1987-08-01), Plies et al.
patent: 4962313 (1990-10-01), Rose
patent: 4963748 (1990-10-01), Szilagyi
patent: 5084622 (1992-01-01), Rose
Optik vol. 59. No. 5, 1981 pp. 401-405 "A Simple Stigmator Circuit for Independent Control of Corrector Amplitude and Orientation" Gemperle et al.
Japanese Journal of Applied Pysics vol. 18, No. 7 pp. 1373-1377 "Spherical Aberration Correction of an Electron Lens by Holography" Tonomura et al.
De Jong Alan F.
Van der Mast Karel D.
Botjer William L.
Dzierzynski Paul M.
Nguyen Kiet T.
U.S. Philips Corp.
LandOfFree
Charged particle beam device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Charged particle beam device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1442964