Charged particle beam deflector

Details Charged particle beam deflector Charged particle beam deflector

1991-11-26

1993-05-25

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, 2504922, H01J 3730

Patent

active

052142892

ABSTRACT:
A charged particle beam deflector has a simple structure for providing a uniform potential distribution over each blanking aperture. The deflector is easy to operate, and stabilizes the shape of a charged particle beam component passing through each blanking aperture even with a low deflection voltage. A pair of deflecting electrodes are arranged on opposing inner walls of each blanking aperture. A voltage applied to the deflecting electrodes is controlled to correctly deflect the charged particle beam component passing through the blanking aperture. A pair of resistance films are arranged on the other opposing inner walls of the blanking aperture, to connect both sides of the deflecting electrodes.
The deflector may employ patterned beam generating apertures. A pair of deflecting electrodes are formed on opposing inner walls of each of the apertures. A voltage applied to the deflecting electrodes is controlled to correctly deflect a charged particle beam component passing through the aperture.

REFERENCES:
patent: 4980567 (1990-12-01), Yasuda et al.
patent: 4982099 (1991-01-01), Lischke

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