Charged particle beam column

Details Charged particle beam column Charged particle beam column

2007-05-29

2007-05-29

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With target means

C250S310000, C250S3960ML, C250S3960ML

Reexamination Certificate

active

11196256

ABSTRACT:
The present invention provides a charged particle beam column that does not cause displacement of an image or degradation of a resolution of images when a charged particle beam is tilted at a large angle. In the charged particle beam column including an aberration corrector, a deflector is used to control the direction of incidence of the charged particle beam on a second condenser lens but the object point of a condenser lens is not shifted. Consequently, the converging charged particle beam is tilted at a large angle with respect to the surface of a specimen without the necessity of shifting the object point of an objective lens lying on the optical axis of the charged particle beam column. At this time, the aberration corrector prevents a shift of an image or degradation of a resolution derived from the tilt of the charged particle beam.

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Joachim Zach et al., “Aberration Correction in a Low Voltage SEM by a Multipole Corrector”, Nuclear Instruments and Methods in Physics Research A 363 (1995) pp. 316-325.

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