Radiant energy – Irradiation of objects or material
Reexamination Certificate
2006-12-29
2010-10-05
Souw, Bernard E (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S492200, C250S492210, C250S492300, C382S154000
Reexamination Certificate
active
07807980
ABSTRACT:
The present invention provides a charged particle beam apparatus used to measure micro-dimensions (CD value) of a semiconductor apparatus or the like which captures images for measurement. For the present invention, a sample for calibration, on which a plurality of polyhedral structural objects with known angles on surfaces produced by the crystal anisotropic etching technology are arranged in a viewing field, is used. A beam landing angle at each position within a viewing field is calculated based on geometric deformation on an image of each polyhedral structural object. Beam control parameters for equalizing the beam landing angle at each position within the viewing field are pre-registered. The registered beam control parameters are applied according to the position of the pattern to be measured within the viewing field when performing dimensional measurement. Accordingly, the present invention provides methods for reducing the variation in the CD value caused by the variation in the electron beam landing angle with respect to the sample with an equal beam landing angle and methods for reducing the instrumental error caused by the difference in the electron beam landing angle between apparatuses.
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A. Miyamoto, et al., “Development of Beam-Tilt Anfle Calibration Technique for CD-SEM”, Collected papers of View2004 vision technology application workshop lecture, pp. 48-53.
Kawada Hiroki
Maeda Tatsuya
Oosaki Mayuka
Sato Mitsugu
Shishido Chie
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Souw Bernard E
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