Charged particle beam apparatus and method of forming...

Details Charged particle beam apparatus and method of forming... Charged particle beam apparatus and method of forming...

2007-11-27

2007-11-27

Vanore, David (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S492200, C250S492230, C250S306000, C250S310000, C216S063000, C438S690000

Reexamination Certificate

active

11196094

ABSTRACT:
A focused ion beam apparatus having two pieces of probers brought into contact with two points of a surface of a sample, a voltage source for applying a constant voltage between the two points with which the probers are brought into contact, and an ammeter for measuring a current flowing between the two points, in which a conductive film is formed to narrow a gap thereof between the two points by operating a deflection electrode and a gas gun and the current flowing between the two points is monitored, and when the current becomes a predetermined value, a focused charged particle beam irradiated to the surface of the sample is made OFF by the blanking electrode.

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