Radiant energy – Means to align or position an object relative to a source or...
Reexamination Certificate
2006-04-18
2006-04-18
Wells, Nikita (Department: 2881)
Radiant energy
Means to align or position an object relative to a source or...
C250S310000, C250S311000, C250S3960ML, C250S3960ML
Reexamination Certificate
active
07030394
ABSTRACT:
According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.
REFERENCES:
patent: 4737640 (1988-04-01), Ohashi
patent: 5047646 (1991-09-01), Hattori et al.
patent: 5144129 (1992-09-01), Kobayashi et al.
patent: 5302829 (1994-04-01), Komatsu et al.
patent: 5313062 (1994-05-01), Yamada
patent: 5391886 (1995-02-01), Yamada et al.
patent: 5396077 (1995-03-01), Sohda et al.
patent: 5502306 (1996-03-01), Meisburger et al.
patent: 5627373 (1997-05-01), Keese
patent: 5793041 (1998-08-01), Ogasawara et al.
patent: 6025600 (2000-02-01), Archie et al.
patent: 6107637 (2000-08-01), Watanabe et al.
patent: 6140644 (2000-10-01), Kawanami et al.
patent: 6538248 (2003-03-01), Kametani et al.
patent: 6565812 (2003-05-01), Nomura et al.
patent: 6753518 (2004-06-01), Watanabe et al.
patent: 6825480 (2004-11-01), Watanabe et al.
Gunji Yasuhiro
Hayakawa Kouichi
Iizuka Masami
Shinada Hiroyuki
Takafuji Atsuko
Hitachi , Ltd.
Townsend and Townsend / and Crew LLP
Vanore David A.
Wells Nikita
LandOfFree
Charged particle beam apparatus and automatic astigmatism... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Charged particle beam apparatus and automatic astigmatism..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus and automatic astigmatism... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3593085