Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

1990-05-01

1991-11-12

Anderson, Bruce C.

Radiant energy

Radiation controlling means

2504922, H01J 312

Patent

active

050650343

ABSTRACT:
A charged particle beam apparatus is provided with an aperture device which includes a plurality of slit plates. Each of the slit plates includes a plurality of slits having different widths. The slit plates are superimposed in a direction of the axis of a charged particle beam so that the corresponding slits in the slit plates overlap to define an aperture which controls a beam current.

REFERENCES:
patent: 3466487 (1969-09-01), Davis et al.
patent: 3736425 (1973-05-01), Chermon
patent: 4055770 (1970-10-01), Milcamps et al.
patent: 4207489 (1980-06-01), Camplan et al.
patent: 4445040 (1984-04-01), Iwasaki et al.
patent: 4899060 (1990-02-01), Lischke
Journal of Vacuum Science Technology, vol. B4(1), Jan./Feb. 1986, "Maskless Ion Beam Writing of Precise Doping Patterns With Be and Si for Molecular Beam Epitaxially Grown Multilayer GaAs", E. Miyauchi et al., pp. 189-193.

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