Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

1989-07-11

1991-04-30

Berman, Jack I.

Radiant energy

Means to align or position an object relative to a source or...

250306, 250307, 250309, 250310, 2504921, 2504922, 2504923, 250396R, H01J 37256

Patent

active

050121090

ABSTRACT:
A charged particle beam apparatus comprising a charged particle beam source(s) for generating an ion beam and an electron beam, a focusing lens system for finely focusing each of the generated ion beam and electron beam, a charged particle beam deflecting system for deflecting each of the focused ion beam and electron beam, and a specimen subjected to irradiation thereof with each of the focused ion beam and electron beam is provided with means for detecting the deviation of the irradiation positions of the ion beam and the electron beam on the specimen from each other and means for making the irradiation positions of the ion beam and the electron beam on the specimen coincident with each other on the basis of the result of detection of the deviation of the irradiation positions from each other.

REFERENCES:
patent: 4334139 (1982-06-01), Wittekoek et al.
patent: 4437012 (1984-03-01), Cavy et al.
patent: 4451738 (1984-05-01), Smith
patent: 4562352 (1985-12-01), Shiokawa
patent: 4694170 (1987-09-01), Slodzian et al.
patent: 4740698 (1988-04-01), Tamura et al.
patent: 4841143 (1989-06-01), Tamura et al.

Affiliated with

Also associated with

Rating

Charged particle beam apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-642436