Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2007-04-17

2009-10-13

Vanore, David A (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S492200

Reexamination Certificate

active

07601974

ABSTRACT:
An object of this invention is to provide a charged particle beam apparatus that is capable of handling samples without adhering impurities onto the samples. In a scanning electron microscope in which a lubricant was coated on a sliding portion of a movable member that moves inside a vacuum chamber, a substance from which low molecular components were removed is used as the lubricant. It is thus possible to inhibit sample contamination and suppress the occurrence of defects in a process following measurement of the samples.

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